Silicon Carbide Ceramic End Effector (Fork Arm/Mofuta oa Letsoho)

Setšoantšo se Hlahisitsoeng sa Silicon Carbide Ceramic End Effector (Fork Arm/Hand Type)

Tlhaloso e Khutšoanyane:

Silicon Carbide Ceramic End Effector ke karolo ea ho sebetsana le lintho ka nepo e entsoeng ka mokhoa o phahameng bakeng sa tlhahiso ea semiconductor, photonics, liroboto tsa othomathike, le ts'ebetso e tsoetseng pele ea thepa. E entsoe ka tlhophiso ea letsoho/letsoho ea fereko, Silicon Carbide Ceramic End Effector e fana ka botsitso bo ikhethang ba litekanyo, ho tiea ho phahameng haholo, le tlhahiso ea likaroloana tse tlase haholo, e leng se etsang hore e be e loketseng bakeng sa ts'ebetso ea phetisetso ea wafer le substrate e bonolo.

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Silicon Carbide Ceramic End Effector (Fork Arm/Mofuta oa Letsoho)

Kakaretso ea Khalase ea Quartz

TheSilicon Carbide Ceramic End Effectorke karolo ea ho sebetsana le eona ka nepo e entsoeng bakeng sa tlhahiso ea semiconductor, photonics, liroboto tsa othomathike, le ts'ebetso e tsoetseng pele ea thepa. E entsoe ka tlhophiso ea letsoho/letsoho ea fereko,Silicon Carbide Ceramic End Effectore fana ka botsitso bo ikhethang ba litekanyo, ho tiea ho phahameng haholo, le tlhahiso ea likaroloana tse tlase haholo, e leng se etsang hore e be e loketseng bakeng sa ts'ebetso ea phetisetso ea wafer le substrate.

Ho fapana le disebediswa tsa setso tsa tshepe kapa tsa polymer,Silicon Carbide Ceramic End Effectore ka boloka ho nepahala ha sebopeho tlas'a mocheso o feteletseng, ho pepesehela lik'hemik'hale le tikoloho ea vacuum. Bokaholimo ba eona bo bataletseng haholo bo netefatsa hore li-wafer tsa silicon, li-substrate tsa khalase, li-sapphire optics, li-wafer tsa SiC le lisebelisoa tse ling tse senyehang habonolo li tšoaroa ka mokhoa o tsitsitseng. Ka sebopeho se bobebe empa se tiile,Silicon Carbide Ceramic End Effectore fokotsa ho thothomela, e eketsa phallo, mme e fokotsa kgatello ya metjhini nakong ya ho potlakisa ka potlako ha roboto.

E entsoe bakeng sa ts'ebetso ea ho se silafatse letho,Silicon Carbide Ceramic End Effectore sebelisoa haholo likoung tsa mojaro tsa FOUP, li-module tsa EFEM, litsamaiso tsa lithography, lisebelisoa tsa phetisetso ea vacuum, le liteishene tsa metrology—e fana ka sebopeho se tšepahalang le se hloekileng haholo pakeng tsa lisebelisoa tsa othomathike le thepa ea bohlokoa.

Molao-motheo oa Tlhahiso

TheSilicon Carbide Ceramic End Effectore hlahisoa ka mokhoa o ikhethileng oa tlhahiso ea letsopa o netefatsang bohloeki bo phahameng, ho ba le bongata bo phahameng le ho tšepahala ha nako e telele. Ho pholletsa le ts'ebetso ea tlhahiso, taolo e tiileng ea boleng e netefatsa hore e 'ngoe le e 'ngoeSilicon Carbide Ceramic End Effectore fihlela litlhoko tse thata tsa litsamaiso tse iketsang tsa sehlopha sa semiconductor.

1. Tokisetso ea Lintho tse Hlokahalang

Tlhahiso e qala ka ho kgetha phofo ya SiC e hlwekileng haholo. Phofo tsena di kgetha matla le bohloeki ba mechiniSilicon Carbide Ceramic End Effector. Li-binder tse khethehileng le lisebelisoa tsa ho sintering lia kopanngoa ho fihlela paka e ntle ea likaroloana le ho khothaletsa ho tiea ho ts'oanang.

2. Ho bopa le ho lokisa

'Mele o motala oaSilicon Carbide Ceramic End Effectore etsoa ka ho sebelisa ho hatella ka isostatic kapa ho enta ka ceramic. Sena se netefatsa sebopeho se leka-lekaneng ka khatello se nang le liphoso tse fokolang tsa ka hare. Sebopeho sa fereko se bōpehile mohatong ona ho lekana bophara ba wafer le li-interface tsa ho kenya tsa roboto.

3. Ho Sireletsa ka Mocheso o Phahameng

Karolo e bōpehileng joaloka eona e siloa ka holimo ho 2000°C sebakeng se se nang vacuum kapa sepakapakeng se se nang letho. Nakong ea mohato ona,Silicon Carbide Ceramic End Effectore fihla botebong bo batlang bo tšoana le ba khopolo-taba, e fana ka thatafalo e babatsehang, ho hanyetsa ho thothomela ha mocheso, le botsitso ba lik'hemik'hale. Mokhahlelo ona o hlalosa botšepehi ba mechini ba karolo.

4. Mochini oa CNC o Nepahetseng

Kamora ho sila, ho sila ha daemane le ho sebetsa ha CNC ka axis e mengata ho ntlafatsa sebopeho saSilicon Carbide Ceramic End Effector. Dikarolo tsa bohlokwa tse kang bokahodimo ba ho kopana le wafer, masoba a ho kenya, di-groove tsa ho hokahanya, le sebaka sa fereko di kentswe ka mochini ho fihlela di le thata ho fihlela ho ±0.01 mm.

5. Ho Qetella le ho Hloekisa Bokaholimo

Qetellong,Silicon Carbide Ceramic End Effectore feta ho bentšoa ha ultra-fine le ho hloekisoa ka ultrasound ka mokhoa o hloekileng haholo. Mohato ona o fokotsa ho teteana ha bokaholimo mme o felisa likaroloana tse nyane, ho netefatsa hore lia lumellana ka kamoreng e hloekileng. Liaparo tsa CVD-SiC tse ikhethileng kapa likarolo tse hanyetsanang le plasma li ka ntlafatsa ho tšoarella ha tsona haholoanyane.

Mokhoa ona o hlokolosi oa tlhahiso o netefatsa hore e mong le e mongSilicon Carbide Ceramic End Effectore sebetsa ka botshepehi dibakeng tse nang le boiketsetso bo phahameng.

Likopo

TheSilicon Carbide Ceramic End Effectore etselitsoe liindasteri moo bohloeki, ho nepahala le ho tšepahala li sa buisanoeng. Moralo oa eona oa letsoho/letsoho la fereko o etsa hore e tšoanelehe bakeng sa matsoho a roboto, litsamaiso tsa ho khetha le ho beha, lisebelisoa tsa phetisetso ea vacuum, le liforomo tse tsoetseng pele tsa tlhahlobo.

1. Tlhahiso ea Semiconductor

Li-fabs tsa semiconductor,Silicon Carbide Ceramic End Effectore sebelisoa haholo ho:

Ho kenya/ho jarolla ka wafer
Ho hlopha FOUP
Sepalangoang sa kamore ea vacuum
Mekhoa ea ho fata, ho lahla le ho beha lintho ka har'a lithography

E hloekile haholo ebile e tiileSilicon Carbide Ceramic End Effectore thibela ho thella ha wafer, seqha le tšilafalo, e tšehetsa li-wafer ho tloha ho 150 mm ho isa ho 300 mm.

2. Photonics le Optoelectronics

Bakeng sa ho sebetsana le lilense tse senyehang habonolo, lisebelisoa tsa mahlo, li-substrate tsa GaN, le li-chip tsa photonic,Silicon Carbide Ceramic End Effectore fana ka botsitso bo se nang ho thothomela. Tlhaho ea eona e seng ea tšepe e qoba tšitiso ea makenete le tšilafalo ea mahlo.

3. Tlhahiso ea Lipontšo le Liphanele

Tlhahisong ea liphanele tsa OLED, QLED, le LCD,Silicon Carbide Ceramic End EffectorE fetisetsa khalase e tšesaane le lintho tse khethehileng ka mokhoa o sireletsehileng. Bokaholimo ba eona bo se nang lik'hemik'hale bo sireletsa khahlanong le masalla le tšenyo ea bokaholimo.

4. Liroboto tsa Lifofane le tsa Vacuum

Likamoreng tse nang le vacuum e ngata le mela ea kopano ea lifofane,Silicon Carbide Ceramic End Effectore mamella mocheso o phahameng, ho pepesehela mahlaseli a kotsi, le likhase tse senyang ha ka nako e ts'oanang e boloka ho nepahala ha boholo.

Ho pholletsa le liindasteri tsena tsohle,Silicon Carbide Ceramic End Effectore sebetsa hantle ho feta mekhoa e meng ea tšepe le polymer ka linako tsohle.

Lipotso Tse Botsoang Khafetsa - Lipotso Tse Botsoang Khafetsa

P1: Na Silicon Carbide Ceramic End Effector e ka tšehetsa boholo bo ikhethileng?

E. ESilicon Carbide Ceramic End Effectore ka etsetsoa boholo bofe kapa bofe ba wafer, phanele, kapa substrate. Sebaka sa fereko, botenya, boima, le mekhoa ea masoba a ho kenya li ka fetoloa ka botlalo.

P2: Na Silicon Carbide Ceramic End Effector e loketse libaka tse se nang letho?

Ka sebele.Silicon Carbide Ceramic End EffectorHa e na khase e ngata haholo ebile ha e na tšilafalo ea tšepe, e leng se etsang hore e be ntle bakeng sa UHV le libaka tse hloekileng.

P3: Melemo ea sesebelisoa sa ho qetela sa SiC ke efe ho feta aluminium kapa tšepe?

A Silicon Carbide Ceramic End Effectorlitlhahiso:

Karolelano e phahameng ea ho thatafala ha boima
Katoloso e tlase ea mocheso
Ho hanyetsa ho tsofala ho phahameng
Ho hanyetsa plasma le lik'hemik'hale hamolemo
Ho se be le ts'enyeho

Mabapi le rona

XKH e ikhethile ka nts'etsopele ea theknoloji e phahameng, tlhahiso le thekiso ea khalase e khethehileng ea mahlo le thepa e ncha ea kristale. Lihlahisoa tsa rona li sebeletsa lisebelisoa tsa elektroniki tsa mahlo, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka likarolo tsa mahlo tsa Sapphire, likoahelo tsa lense ea mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le li-wafer tsa kristale tsa semiconductor. Ka boiphihlelo bo nang le boiphihlelo le lisebelisoa tsa sejoale-joale, re ipabola ts'ebetsong ea lihlahisoa tse seng tsa maemo a holimo, re ikemiselitse ho ba khoebo e etellang pele ea theknoloji e phahameng ea lisebelisoa tsa optoelectronic.