Mohala oa Boiketsetso oa Silicon / Silicon Carbide (SiC) Wafer oa Mehato e Mene o hokahantsoeng oa ho Polisa (Mohala o Kopaneng oa ho Tšoara oa Kamora ho Polish)

Mohala oa Boiketsetso oa Silicon / Silicon Carbide (SiC) Wafer oa Mehato e Mene o hokahantsoeng oa ho Polisa (Mohala o Kopantsoeng oa ho Tšoara ka Mor'a ho Polish) Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Mohala ona oa ho Iketsetsa oa ho Polisa o Kopantsoeng oa Mehato e Mene ke tharollo e kopaneng, e inthaneteng e etselitsoengho benya ka mor'a ho benya / kamora ho benya ka mor'a ho benyats'ebetso easiliconlekhabide ea silicon (SiC)li-wafer. Li hahiloe ho potolohalijana tsa ceramic (lipoleiti tsa ceramic), sistimi e kopanya mesebetsi e mengata e latelang moleng o le mong o hokahaneng—e thusang masela ho fokotsa ho sebetsana le ona ka letsoho, ho tsitsisa nako ea ho sebetsana le ona le ho matlafatsa taolo ea tšilafalo.

Romella imeile ho rona

Likaroloana

Setšoantšo se qaqileng

Mohala oa Boiketsetso oa Silicon / Silicon Carbide (SiC) Wafer oa Mehato e Mene o hokahantsoeng oa ho Polisa (Mohala o Kopaneng oa ho Tšoara oa Kamora ho Polish)4

Kakaretso

Tlhahisong ea li-semiconductor,tlhoekiso e sebetsang hantle kamora CMPe tsebahala haholo e le mohato oa bohlokoa oa ho fokotsa liphoso pele ho ts'ebetso e latelang, le mekhoa e tsoetseng pele (ho kenyeletsoaho hloekisa megasonic) hangata li tšohloa bakeng sa ho ntlafatsa ts'ebetso ea ho tlosa likaroloana.

Haholo-holo bakeng sa SiC,ho thatafala ho hoholo le ho se sebetse hantle ha lik'hemik'haleetsa hore ho bentsha polishing ho be thata (hangata ho amahanngoa le sekhahla se tlase sa ho tlosa thepa le kotsi e phahameng ea tšenyo ea bokaholimo/ka tlas'a lefatše), e leng se etsang hore boiketsetso bo tsitsitseng ba kamora ho bentsha polishing le ho hloekisa/ho sebetsana le taolo e bohlokoa haholo.

Melemo ea Bohlokoa

Mohala o le mong o kopaneng o tšehetsang:

Karohano le pokello ea li-wafer(kamora ho bentša)
Ho boloka/ho boloka thepa ea tšepe ea letsopa
Ho hlwekisa thepa ea letsopa
Ho kenya wafer (ho e khomaretsa) hodima dijari tsa letsopa
Ts'ebetso e kopaneng, ea mola o le mong bakeng saLi-wafer tsa lisenthimithara tse 6–8

Litlhaloso tsa Tekheniki (Ho tsoa ho Leqephe la Lintlha le Fanoeng)

Litekanyo tsa Lisebelisoa (L×W×H):13643 × 5030 × 2300 mm
Phepelo ea motlakase:AC 380 V, 50 Hz
Matla a Feletseng:119 kW
Ho Hloekisa Bohloeki:0.5 μm < 50 ka 'ngoe; 5 μm < 1 ka 'ngoe
Ho Phahama ho bataletseng:≤ 2 μm

Referense ea Phello (Ho tsoa ho Leqephe la Lintlha le Fanoeng)

Litekanyo tsa Lisebelisoa (L×W×H):13643 × 5030 × 2300 mm
Phepelo ea motlakase:AC 380 V, 50 Hz
Matla a Feletseng:119 kW
Ho Hloekisa Bohloeki:0.5 μm < 50 ka 'ngoe; 5 μm < 1 ka 'ngoe
Ho Phahama ho bataletseng:≤ 2 μm

Phallo e Tloaelehileng ea Mola

Infeed / sebopeho se tsoang sebakeng sa ho bentša se holimo
Karohano le pokello ea li-wafer
Ho boloka/ho boloka thepa ea letsopa (ho arola lintho tse kopantsoeng ka nako e itseng)
Ho hlwekisa thepa ea letsopa
Ho kenngwa ha wafer hodima dijara (ka bohloeki le taolo ya ho batalla)
Fepa ho ea ts'ebetsong e ka tlase kapa thepa

LBH

P1: Ke mathata afe ao mola ona o a rarollang haholo-holo?
K: E nolofatsa mesebetsi ya kamora ho benya ka ho kopanya karohano/pokello ya wafer, ho buffering ya carrier ya ceramic, ho hlwekisa carrier, le ho kenya wafer moleng o le mong o hokahantsweng wa othomathiki—ho fokotsa dintlha tsa ho ama ka letsoho le ho tsitsisa morethetho wa tlhahiso.

P2: Ke thepa le boholo bofe ba wafer bo tshehetswang?
A:Silicone le SiC,Li-inch tse 6–8li-wafer (ho ea ka litlhaloso tse fanoeng).

P3: Ke hobane'ng ha tlhoekiso ea kamora CMP e hatisoa indastering?
K: Lingoliloeng tsa indasteri li totobatsa hore tlhoko ea tlhoekiso e sebetsang ea kamora CMP e eketsehile ho fokotsa bongata ba liphoso pele ho mohato o latelang; mekhoa e thehiloeng ho megasonic e atisa ho ithutoa bakeng sa ho ntlafatsa ho tlosoa ha likaroloana.

Mabapi le rona

XKH e ikhethile ka nts'etsopele ea theknoloji e phahameng, tlhahiso le thekiso ea khalase e khethehileng ea mahlo le thepa e ncha ea kristale. Lihlahisoa tsa rona li sebeletsa lisebelisoa tsa elektroniki tsa mahlo, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka likarolo tsa mahlo tsa Sapphire, likoahelo tsa lense ea mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le li-wafer tsa kristale tsa semiconductor. Ka boiphihlelo bo nang le boiphihlelo le lisebelisoa tsa sejoale-joale, re ipabola ts'ebetsong ea lihlahisoa tse seng tsa maemo a holimo, re ikemiselitse ho ba khoebo e etellang pele ea theknoloji e phahameng ea lisebelisoa tsa optoelectronic.