Substrate ea carbide ea Sic silicon ea lisenthimithara tse 2 6H-N Mofuta 0.33mm 0.43mm polishing e mahlakore a mabeli Conductivity e phahameng ea mocheso Tšebeliso e tlase ea matla

Substrate ea carbide ea Sic silicon ea lisenthimithara tse 2 6H-N Mofuta 0.33mm 0.43mm Ho bentša mahlakore a mabeli Ho tsamaisa mocheso o phahameng Tšebeliso e tlase ea matla Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Silicon carbide (SiC) ke thepa ea semiconductor e nang le lekhalo le leholo la sehlopha se seholo se nang le conductivity e ntle ea mocheso le botsitso ba lik'hemik'hale.6H-Ne bontša hore sebopeho sa eona sa kristale se mahlakore a tšeletseng (6H), 'me "N" e bontša hore ke thepa ea semiconductor ea mofuta oa N, eo hangata e finyelloang ka ho sebelisa naetrojene ka ho e sebelisa.
Karoloana ea silicon carbide e na le litšobotsi tse ntle tsa ho hanyetsa khatello e phahameng, ho hanyetsa mocheso o phahameng, ts'ebetso e phahameng ea maqhubu, jj. Ha e bapisoa le lihlahisoa tsa silicon, sesebelisoa se lokisitsoeng ke karoloana ea silicon se ka fokotsa tahlehelo ka 80% le ho fokotsa boholo ba sesebelisoa ka 90%. Mabapi le likoloi tse ncha tsa matla, silicon carbide e ka thusa likoloi tse ncha tsa matla ho fihlela bobebe le ho fokotsa tahlehelo, le ho eketsa sebaka sa ho khanna; Tšimong ea puisano ea 5G, e ka sebelisoa bakeng sa tlhahiso ea lisebelisoa tse amanang; Tlhahisong ea motlakase oa photovoltaic e ka ntlafatsa katleho ea phetoho; Tšimo ea lipalangoang tsa terene e ka sebelisa litšobotsi tsa eona tsa mocheso o phahameng le ho hanyetsa khatello e phahameng.

Romella imeile ho rona

Likaroloana

Tse latelang ke litšobotsi tsa wafer ea silicon carbide ea 2inch

1. Bothata: Bothata ba Mohs bo ka ba 9.2.
2. Sebopeho sa kristale: sebopeho sa lerako la mahlakore a tsheletseng.
3. Ho tsamaisa mocheso ka bongata: ho tsamaisa mocheso ka bongata ha SiC ho phahame haholo ho feta ha silicon, e leng se thusang ho qhala mocheso ka katleho.
4. Sekgeo se seholo sa lebanta: sekgeo sa lebanta sa SiC se ka ba 3.3eV, se loketse dikopo tsa mocheso o phahameng, maqhubu a phahameng le matla a phahameng.
5. Tšimo ea motlakase e senyehang le ho tsamaea ha lielektrone: Tšimo ea motlakase e senyehang haholo le ho tsamaea ha lielektrone, e loketse lisebelisoa tsa elektroniki tse sebetsang hantle tse kang MOSFET le IGBT.
6. Ho tsitsa ha lik'hemik'hale le ho hanyetsa mahlaseli: ho loketse libaka tse thata tse kang tsa sefofane le tšireletso ea naha. Ho hanyetsoa ha lik'hemik'hale hantle, asiti, alkali le metsoako e meng ea lik'hemik'hale.
7. Matla a phahameng a mechini: Matla a matle a mechini tlas'a mocheso o phahameng le tikoloho e nang le khatello e phahameng.
E ka sebelisoa haholo lisebelisoa tsa elektroniki tse nang le matla a phahameng, maqhubu a phahameng le mocheso o phahameng, joalo ka li-photodetector tsa ultraviolet, li-inverter tsa photovoltaic, li-PCU tsa likoloi tsa motlakase, jj.

Wafer ea silicon carbide ea 2inch e na le lits'ebetso tse 'maloa.

1. Lisebelisoa tsa elektroniki tse sebelisang motlakase: li sebelisetsoa ho etsa MOSFET, IGBT le lisebelisoa tse ling tse sebetsang hantle, tse sebelisoang haholo ho fetoleng motlakase le likoloing tsa motlakase.

Disebediswa tsa 2.Rf: Disebedisweng tsa puisano, SiC e ka sebediswa ho di-amplifier tsa maqhubu a hodimo le di-amplifier tsa matla a RF.

3. Disebediswa tsa fotoelectric: tse kang di-LED tse thehilweng ho SIC, haholoholo ditshebedisong tse putswa le tsa ultraviolet.

4. Disensor: Ka lebaka la ho hanyetsa mocheso o phahameng le dikhemikhale, di-substrate tsa SiC di ka sebediswa ho etsa disensor tsa mocheso o phahameng le ditshebediso tse ding tsa disensor.

5. Sesole le sefofane: ka lebaka la ho hanyetsa mocheso o phahameng le litšobotsi tse matla haholo, e loketse ho sebelisoa libakeng tse feteletseng.

Masimo a mantlha a ts'ebeliso ea substrate ea SIC ea mofuta oa 6H-N a kenyelletsa likoloi tse ncha tsa matla, liteishene tsa phetisetso ea motlakase o phahameng le phetoho, thepa e tšoeu, literene tse lebelo le phahameng, lienjene, inverter ea photovoltaic, phepelo ea motlakase oa pulse le tse ling.

XKH e ka etsoa ka botenya bo fapaneng ho latela litlhoko tsa bareki. Ho na le mekhoa e fapaneng ea ho hlaba le ho bentša holim'a metsi. Mefuta e fapaneng ea ho sebelisa doping (joalo ka ho sebelisa naetrojene) e tšehetsoa. Nako e tloaelehileng ea ho tlisa ke libeke tse 2-4, ho latela mokhoa oa ho iketsetsa. Sebelisa thepa ea ho paka e sa fetoheng le foam e thibelang ho sisinyeha ha lefatše ho netefatsa polokeho ea substrate. Ho na le likhetho tse fapaneng tsa ho romella, 'me bareki ba ka hlahloba boemo ba thepa ka nako ea sebele ka nomoro ea ho latela e fanoeng. Fana ka tšehetso ea tekheniki le lits'ebeletso tsa boeletsi ho netefatsa hore bareki ba ka rarolla mathata ts'ebetsong ea ts'ebeliso.