Li-wafer tsa substrate tsa HPSI SiC tse 6inch Silicon Carbide Li-wafer tsa SiC tse nyelisang hanyane
Theknoloji ea Kholo ea PVT Silicon Carbide Crystal SiC
Mekhoa ea hona joale ea kholo bakeng sa kristale e le 'ngoe ea SiC e kenyelletsa haholo-holo tse tharo tse latelang: mokhoa oa mokhahlelo oa metsi, mokhoa oa ho boloka mouoane oa lik'hemik'hale mochesong o phahameng, le mokhoa oa ho tsamaisa mouoane oa 'mele (PVT). Har'a tsona, mokhoa oa PVT ke theknoloji e batlisisitsoeng ka ho fetisisa le e hōlileng tsebong bakeng sa kholo ea kristale e le 'ngoe ea SiC, 'me mathata a eona a tekheniki ke:
(1) Kristale e le 'ngoe ea SiC mochesong o phahameng oa 2300 ° C ka holim'a kamore ea graphite e koetsoeng ho phethela ts'ebetso ea phetoho ea "solid - gas - solid", potoloho ea kholo e telele, e thata ho e laola, 'me e sekametse ho li-microtubules, li-inclusions le liphoso tse ling.
(2) Silicon carbide kristale e le 'ngoe, ho kenyeletsoa mefuta e fetang 200 e fapaneng ea kristale, empa tlhahiso ea mofuta o le mong feela oa kristale ka kakaretso, ho bonolo ho hlahisa phetoho ea mofuta oa kristale ts'ebetsong ea kholo e fellang ka liphoso tsa ho kenyelletsoa ha mefuta e mengata, ts'ebetso ea ho lokisa mofuta o le mong oa kristale e itseng e thata ho laola botsitso ba ts'ebetso, mohlala, mokhoa o ka sehloohong oa hona joale oa mofuta oa 4H.
(3) Tšimo ea mocheso ea kholo ea kristale e le 'ngoe ea silicon carbide ho na le phapang ea mocheso, e leng se fellang ka ts'ebetso ea kholo ea kristale ho ba le khatello ea ka hare ea tlhaho le ho falla ha lintho, liphoso le liphoso tse ling tse bakoang.
(4) Ts'ebetso ea kholo ea kristale e le 'ngoe ea silicon carbide e hloka ho laola ka tieo ho kenngoa ha litšila tsa kantle, e le ho fumana kristale e hloekileng haholo e thibelang mocheso kapa kristale e tsamaisang mocheso e nang le mokelikeli o lebileng. Bakeng sa li-substrate tsa silicon carbide tse thibelang mocheso tse sebelisoang lisebelisoa tsa RF, thepa ea motlakase e hloka ho finyelloa ka ho laola khatello e tlase haholo ea litšila le mefuta e itseng ea liphoso tsa lintlha ka har'a kristale.
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