8inch Silicon wafer P/N-mofuta (100) 1-100Ω dummy reclaim substrate
Hlahisa lebokose la wafer
Sephaphatha sa silicon sa 8-inch ke sesebelisoa sa silicon se sebelisoang hangata mme se sebelisoa haholo ts'ebetsong ea ho etsa lipotoloho tse kopaneng. Li-wafers tse joalo tsa silicon hangata li sebelisoa ho etsa mefuta e fapaneng ea lipotoloho tse kopaneng, ho kenyeletsoa li-microprocessors, li-memory chips, li-sensor le lisebelisoa tse ling tsa elektroniki. Li-wafers tsa silicon tsa 8-inch li atisa ho sebelisoa ho etsa li-chips tsa boholo bo batlang bo le boholo, ka melemo e kenyelletsang sebaka se seholo sa holim'a metsi le bokhoni ba ho etsa lichifi tse ngata holim'a lesela le le leng la silicon, le lebisang ho eketseng katleho ea tlhahiso. Sephaphatha sa silicon sa 8-inch se boetse se na le lisebelisoa tse ntle tsa mochini le lik'hemik'hale, tse loketseng tlhahiso e kholo ea potoloho e kopaneng.
Likarolo tsa sehlahisoa
8" mofuta oa P/N, sephaphatha sa silicon se betliloeng (li-pcs tse 25)
Boemo: 200
Resistivity: 0.1 - 40 ohm•cm (E ka fapana ho ea ka batch)
Botenya: 725+/-20um
Sehlopha sa Prime/Monitor/Test
LITŠOANTŠISO TŠEBELE
Paramethara | Sebopeho |
Mofuta/Dopant | P, Boron N, Phosphorous N, Antimony N, Arsenic |
Litloaelo | <100>, <111> fokotsa litloaelo ho latela lintlha tsa moreki |
Litaba tsa Oksijene | 1019ppmA Ho mamellana ka tloaelo ho latela maikutlo a moreki |
Litaba tsa Carbon | <0.6 ppmA |
LITŠOANTŠISO MOCHEFE
Paramethara | Tonakholo | Mohlokomedi/ Teko A | Teko |
Diameter | 200±0.2mm | 200 ± 0.2mm | 200 ± 0.5 limilimithara |
Botenya | 725±20µm (e tloaelehileng) | 725±25µm(e tloaelehileng) 450±25µm 625±25µm 1000±25µm 1300±25µm 1500±25µm | 725±50µm (e tloaelehileng) |
TTV | <5µm | <10µm | <15µm |
Inamela | <30µm | <30µm | <50µm |
Qela | <30µm | <30µm | <50µm |
Edge Rounding | SEMI-STD | ||
Ho tshwaya | Primary SEMI-Flat feela, SEMI-STD Flats Jeida Flat, Notch |
Paramethara | Tonakholo | Mohlokomedi/ Teko A | Teko |
Litekanyetso tsa Lehlakore le ka Pele | |||
Boemo ba bokahodimo | Mochini oa lik'hemik'hale o hloekisitsoeng | Mochini oa lik'hemik'hale o hloekisitsoeng | Mochini oa lik'hemik'hale o hloekisitsoeng |
Bokhopo ba Sekaho | <2 A° | <2 A° | <2 A° |
Tšoaetso Likaroloana@ >0.3 µm | = 20 | = 20 | = 30 |
Haze, Likoti Lekhapetla la Orange | Ha ho letho | Ha ho letho | Ha ho letho |
Bona, Marks Litsela | Ha ho letho | Ha ho letho | Ha ho letho |
Mekhahlelo ea Lehlakore la Morao | |||
Mapetso, maoto a likhoka, matšoao a sakha, matheba | Ha ho letho | Ha ho letho | Ha ho letho |
Boemo ba bokahodimo | Caustic e tsitsitse |