Letsoho la letsoho la SiC ceramic end effector bakeng sa ho betla wafer

Letsoho la letsoho la SiC ceramic end effector bakeng sa ho jara wafer Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Li-wafer tsa LiNbO₃ li emela maemo a khauta ho li-photonics tse kopantsoeng le li-acoustics tse nepahetseng, tse fanang ka ts'ebetso e sa bapisoang le litsamaisong tsa sejoale-joale tsa optoelectronic. Jwalo ka moetsi ea ka sehloohong, re ntlafalitse bonono ba ho hlahisa li-substrate tsena tse entsoeng ka boenjiniere ka mekhoa e tsoetseng pele ea ho leka-lekanya lipalangoang tsa mouoane, ho fihlela phetheho ea kristale e etellang pele indastering ka bongata ba sekoli bo ka tlase ho 50/cm².

Bokgoni ba tlhahiso ya XKH bo akaretsa bophara ho tloha ho 75mm ho isa ho 150mm, ka taolo e nepahetseng ya tataiso (X/Y/Z-cut ±0.3°) le dikgetho tse ikgethang tsa doping ho kenyeletswa le dielemente tsa rare-earth. Motswako o ikgethang wa thepa ho LiNbO₃ Wafers – ho kenyeletswa le coefficient ya tsona e ikgethang ya r₃₃ (32±2 pm/V) le ponaletso e pharaletseng ho tloha haufi le UV ho isa bohareng ba IR – di etsa hore di be bohlokwa bakeng sa dipotoloho tsa photonic tsa moloko o latelang le disebediswa tsa acoustic tse nang le maqhubu a phahameng.

Romella imeile ho rona

Likaroloana

Kakaretso ea phello ea qetello ea ceramic ea SiC

Sesebelisoa sa ho qetela sa ceramic sa SiC (Silicon Carbide) ke karolo ea bohlokoa lits'ebetsong tsa ho sebetsana le li-wafer tse nepahetseng haholo tse sebelisoang tlhahisong ea li-semiconductor le tikolohong e tsoetseng pele ea microfabrication. E entsoe ho fihlela litlhoko tse hlokang tlhokomelo ea libaka tse hloekileng haholo, tse nang le mocheso o phahameng le tse tsitsitseng haholo, sesebelisoa sena se ikhethileng sa ho qetela se netefatsa hore li-wafer li tsamaisoa ka mokhoa o tšepahalang le o se nang litšila nakong ea mehato ea bohlokoa ea tlhahiso joalo ka lithography, etching le deposition.

Ka ho sebelisa thepa e phahameng ea silicon carbide—e kang ho tsamaisa mocheso ka matla, ho thatafala ho feteletseng, ho se sebetse hantle ha lik'hemik'hale, le katoloso e fokolang ea mocheso—sephetho sa SiC ceramic se fana ka ho satalla ha mechini le botsitso bo sa bapisoeng esita le tlas'a potoloho e potlakileng ea mocheso kapa likamoreng tsa ts'ebetso e senyang. Tlhahiso ea eona e tlase ea likaroloana le litšobotsi tsa ho hanyetsa plasma li etsa hore e tšoanelehe haholo bakeng sa lits'ebetso tsa ho hloekisa le tsa ho sebetsa ka vacuum, moo ho boloka botšepehi ba bokaholimo ba wafer le ho fokotsa tšilafalo ea likaroloana e leng tsa bohlokoa ka ho fetisisa.

Kopo ea phello ea phello ea ceramic ea SiC

1. Ho Sebetsana le Wafer ea Semiconductor

Li-effector tsa SiC ceramic li sebelisoa haholo indastering ea semiconductor bakeng sa ho sebetsana le li-wafer tsa silicon nakong ea tlhahiso e iketsang. Li-effector tsena hangata li kenngoa matsohong a roboto kapa litsamaisong tsa phetisetso ea vacuum 'me li etselitsoe ho amohela li-wafer tsa boholo bo fapaneng joalo ka 200mm le 300mm. Li bohlokoa lits'ebetsong tse kenyeletsang Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), ho fata le ho hasana—moo mocheso o phahameng, maemo a vacuum le likhase tse senyang li atileng. Khanyetso e ikhethang ea mocheso oa SiC le botsitso ba lik'hemik'hale li etsa hore e be thepa e loketseng ho mamella libaka tse thata joalo ntle le ho senyeha.

2. Ho lumellana ha Kamore ea ho Hloekisa le ea Vacuum

Libakeng tsa ho hlwekisa le tsa vacuum, moo tšilafalo ea likaroloana e lokelang ho fokotsoa, liserami tsa SiC li fana ka melemo e meholo. Bokaholimo bo teteaneng, bo boreleli ba thepa bo hanela tlhahiso ea likaroloana, bo thusa ho boloka botšepehi ba wafer nakong ea lipalangoang. Sena se etsa hore li-effector tsa SiC li lokele haholo lits'ebetso tsa bohlokoa tse kang Extreme Ultraviolet Lithography (EUV) le Atomic Layer Deposition (ALD), moo bohloeki bo leng bohlokoa. Ho feta moo, ho tsoa ha SiC ka khase e tlase le khanyetso e phahameng ea plasma li netefatsa ts'ebetso e tšepahalang likamoreng tsa vacuum, ho eketsa nako ea bophelo ba lisebelisoa le ho fokotsa makhetlo a tlhokomelo.

3. Mekhoa ea ho Beha Maemo ka ho Nepahala Haholo

Ho nepahala le botsitso ke tsa bohlokoa lits'ebetsong tse tsoetseng pele tsa ho sebetsana le wafer, haholo-holo ho metrology, tlhahlobo le lisebelisoa tsa ho hokahanya. Li-ceramic tsa SiC li na le coefficient e tlase haholo ea katoloso ea mocheso le ho tiea ho hoholo, e leng se lumellang effector ea ho qetela ho boloka ho nepahala ha sebopeho sa eona esita le tlas'a potoloho ea mocheso kapa mojaro oa mechini. Sena se netefatsa hore li-wafer li lula li lebile hantle nakong ea lipalangoang, ho fokotsa kotsi ea ho taboha hanyane, ho se lumellane hantle, kapa liphoso tsa tekanyo - lintlha tse ntseng li le bohlokoa haholo li-node tsa ts'ebetso ea sub-5nm.

Thepa ea phello ea ceramic ea SiC

1. Matla a Phahameng a Mechini le ho Tiea

Liserame tsa SiC li na le matla a ikhethang a mechini, ka matla a ho kobeha a atisang ho feta 400 MPa le boleng ba Vickers bo kaholimo ho 2000 HV. Sena se etsa hore li hanele khatello ea mechini, tšusumetso le ho tsofala, esita le ka mor'a tšebeliso e telele ea ts'ebetso. Ho tiea ho hoholo ha SiC ho boetse ho fokotsa ho fapoha nakong ea phetisetso ea wafer e potlakileng, ho netefatsa hore boemo bo nepahetse le bo ka phetoa.

2. Botsitso bo Botle ba Thermal

E 'ngoe ea litšobotsi tsa bohlokoa ka ho fetisisa tsa liserami tsa SiC ke bokhoni ba tsona ba ho mamella mocheso o phahameng haholo—hangata ho fihlela ho 1600°C sepakapakeng se sa sebetseng—ntle le ho lahleheloa ke botšepehi ba mechini. Coefficient ea tsona e tlase ea katoloso ea mocheso (~4.0 x 10⁻⁶ /K) e netefatsa botsitso ba litekanyo tlas'a potoloho ea mocheso, e leng se etsang hore li be ntle bakeng sa lits'ebetso tse kang CVD, PVD, le annealing ea mocheso o phahameng.

Lipotso le Likarabo tsa phello ea SiC ceramic

P: Ke thepa efe e sebelisoang ho effect ea wafer end?

A:Hangata di-effector tsa Wafer di etswa ka thepa e fanang ka matla a phahameng, botsitso ba mocheso, le tlhahiso e tlase ya dikarolwana. Har'a tsena, Silicon Carbide (SiC) ceramic ke e 'ngoe ya thepa e tswetseng pele le e ratwang haholo. Di-ceramic tsa SiC di thata haholo, di tsitsitse mochesong, ha di na dikhemikhale, mme di hanela ho tsofala, e leng se etsang hore di be ntle bakeng sa ho sebetsana le di-wafer tse bonolo tsa silicon dibakeng tse hlwekileng le tse hlwekileng. Ha di bapiswa le quartz kapa ditshipi tse manehilweng, SiC e fana ka botsitso bo phahameng ba boholo tlasa mocheso o phahameng mme ha e lahle dikarolwana, e leng se thusang ho thibela tshilafatso.