LiTaO3 Wafer 2inch-8inch 10x10x0.5 mm 1sp 2sp bakeng sa Dikgokahano tsa 5G/6G

LiTaO3 Wafer 2inch-8inch 10x10x0.5 mm 1sp 2sp bakeng sa Puisano ea 5G/6G Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

LiTaO3 Wafer (lithium tantalate wafer), thepa ea bohlokoa ho li-semiconductor tsa moloko oa boraro le li-optoelectronics, e sebelisa mocheso oa eona o phahameng oa Curie (610°C), sebaka se pharaletseng sa ponaletso (0.4–5.0 μm), coefficient e phahameng ea piezoelectric (d33 > 1,500 pC/N), le tahlehelo e tlase ea dielectric (tanδ < 2%)ho fetola puisano ea 5G, kopanyo ea photonic, le lisebelisoa tsa quantum. Ha e sebelisa mahlale a tsoetseng pele a tlhahiso joalo ka lipalangoang tsa mouoane oa 'mele (PVT)le chemical vapor deposition (CVD), XKH e fana ka li-wafer tsa X/Y/Z-cut, 42°Y-cut, le periodicly poled (PPLT)ka liforomo tsa 2–8-inch, tse nang le bokaholimo bo bobe (Ra) <0.5 nm le micropipe density <0.1 cm⁻². Litšebeletso tsa rona li kenyelletsa Fe doping, phokotso ea lik'hemik'hale, le kopanyo ea Smart-Cut e fapaneng, e sebetsanang le li-filter tsa optical tse sebetsang hantle, li-infrared detectors, le mehloli ea leseli la quantum. Thepa ena e tsamaisa tsoelo-pele ho miniaturization, ts'ebetso ea maqhubu a phahameng, le botsitso ba mocheso, e potlakisa ho nkeloa sebaka ha thepa ea ka tlung mahlaleng a bohlokoa.

Romella imeile ho rona

Likaroloana

Litekanyetso tsa tekheniki

Lebitso	LiTaO3 ea boemo ba mahlo	Boemo ba tafole ea molumo LiTaO3
Axial	Z sehiloeng + / - 0.2 °	Sehiloeng sa 36 ° Y / Sehiloeng sa 42 ° Y / Sehiloeng sa X (+ / - 0.2 °)
Bophara	76.2mm + / - 0.3mm/ 100±0.2mm	76.2mm + /-0.3mm 100mm + /-0.3mm 0r 150±0.5mm
Sefofane sa Datum	22mm + / - 2mm	22mm + /-2mm 32mm + /-2mm
Botenya	500um + /-5mm 1000um + /-5mm	500um + /-20mm 350um + /-20mm
TTV	≤ 10um	≤ 10um
Mocheso oa Curie	605 °C + / - 0.7 °C (mokhoa oa DTA)	605 °C + / -3 °C (mokhoa oa DTA
Boleng ba bokaholimo	Ho bentša mahlakore a mabeli	Ho bentša mahlakore a mabeli
Meeli e nang le chamfered	ho potoloha ha moedi	ho potoloha ha moedi

Litšobotsi tsa Bohlokoa

1. Tshebetso ea Motlakase le ea Optical
· Electro-Optic Coefficient: r33 e fihla 30 pm/V (X-cut), e phahame ka 1.5× ho feta LiNbO3, e nolofalletsang ho fetolwa ha electro-optic ka ultra-wideband (>40 GHz bandwidth).
· Karabelo e pharaletseng ea li-spectral: Sebaka sa phetisetso ke 0.4–5.0 μm (botenya ba 8 mm), ka moeli oa ho monya mahlaseli a kotsi a ultraviolet o ka tlase ho 280 nm, e leng se loketseng bakeng sa li-laser tsa UV le lisebelisoa tsa quantum dot.
· Koefficient e Tlase ea Pyroelectric: dP/dT = 3.5×10⁻⁴ C/(m²·K), e netefatsang botsitso li-sensor tsa infrared tsa mocheso o phahameng.

2. Thepa ea Thermal le Mechanical
· Ho Tsamaisa Mocheso o Phahameng: 4.6 W/m·K (X-cut), e fetang habeli ea quartz, e tšehetsang potoloho ea mocheso ea -200–500°C.
· Katoloso e Tlase ea Thempereichara: CTE = 4.1×10⁻⁶/K (25–1000°C), e lumellana le sephutheloana sa silicon ho fokotsa khatello ea mocheso.
3. Taolo e Phethahetseng le ho Sebetsa ka nepo
· Botenya ba Micropipe: <0.1 cm⁻² (li-wafer tsa lisenthimithara tse 8), botenya ba ho falla <500 cm⁻² (e netefalitsoe ka ho etching ha KOH).
· Boleng ba Bokaholimo: CMP e bentšitsoeng ho Ra <0.5 nm, e fihlela litlhoko tsa ho ba bataletse ha lithography tsa sehlopha sa EUV.

Litšebeliso tsa Bohlokoa

Sebaka	Maemo a Kopo	Melemo ea Tekheniki
Puisano ea Optical	Li-laser tsa 100G/400G DWDM, li-module tsa silicon photonics tse kopantsoeng	Phetiso e pharaletseng ea spectral ea wafer ea LiTaO3 le tahlehelo e tlase ea waveguide (α <0.1 dB/cm) li nolofalletsa katoloso ea C-band.
Dikgokahano tsa 5G/6G	Lifilthara tsa SAW (1.8–3.5 GHz), lifilthara tsa BAW-SMR	Li-wafer tse khaotsoeng ka 42°Y li fihlella Kt² >15%, li fana ka tahlehelo e tlase ea ho kenya (<1.5 dB) le ho phutholoha ho hoholo (>30 dB).
Theknoloji ea Quantum	Li-detector tsa photon e le 'ngoe, mehloli ea phetoho ea parametric down-conversion	Koefficient e phahameng e seng mola (χ(2)=40 pm/V) le sekhahla se tlase sa palo e lefifi (<100 counts/s) li ntlafatsa botšepehi ba quantum.
Kutloisiso ea Indasteri	Li-sensor tsa khatello ea mocheso o phahameng, li-transformer tsa hona joale	Karabelo ea piezoelectric ea wafer ea LiTaO3 (g33 >20 mV/m) le mamello ea mocheso o phahameng (>400°C) li lumellana le libaka tse feteletseng.

Litšebeletso tsa XKH

1. Tlhahiso ea Wafer e Ikhethileng

· Boholo le ho Seha: Li-wafer tsa lisenthimithara tse 2–8 tse nang le likarolo tse khaotsoeng tsa X/Y/Z, tse khaotsoeng tsa 42°Y, le tse khaotsoeng ka mokhoa o ikhethileng (± 0.01° mamello).

· Taolo ea ho sebelisa lithethefatsi tse tahang: Fe, Mg doping ka mokhoa oa Czochralski (sebaka sa mahloriso 10¹⁶–10¹⁹ cm⁻³) ho ntlafatsa li-coefficient tsa electro-optic le botsitso ba mocheso.

2. Mekhoa e Tsoetseng Pele ea Ts'ebetso
.
· Periodic Poling (PPLT): Theknoloji ea Smart-Cut bakeng sa li-wafer tsa LTOI, e fihlellang ho nepahala ha nako ea domain ea ±10 nm le phetoho ea maqhubu a quasi-phase-matched (QPM).

· Ho Kopanya ho sa Tšoaneng: Li-wafer tse kopantsoeng tsa LiTaO3 tse thehiloeng ho Si (POI) tse nang le taolo ea botenya (300–600 nm) le tsamaiso ea mocheso ho fihlela ho 8.78 W/m·K bakeng sa li-filter tsa SAW tse nang le maqhubu a phahameng.

3. Mekhoa ea Tsamaiso ea Boleng
.
· Teko ea ho Qetela: Raman spectroscopy (netefatso ea polytype), XRD (kristalinity), AFM (mofuta oa bokaholimo), le teko ea ho tšoana ha optical (Δn <5×10⁻⁵).

4. Tšehetso ea Ketane ea Phepelo ea Lefatše ka Bophara
.
· Bokgoni ba Tlhahiso: Tlhahiso ya kgwedi le kgwedi > di-wafer tse 5,000 (8-inch: 70%), ka phano ya tshohanyetso ya dihora tse 48.

· Marangrang a Thepa: Ho akaretsoa Europe, Amerika Leboea, le Asia-Pacific ka thepa ea moea/leoatle ka liphutheloana tse laoloang ke mocheso.