LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6inch Orientaiton Y-42°/36°/108° Botenya 250-500um

LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6寸inch Orientaiton Y-42°/36°/108° Botenya 250-500umSetšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Li-wafer tsa LiTaO₃ li emela sistimi ea bohlokoa ea thepa ea piezoelectric le ferroelectric, e bonts'ang li-coefficients tse ikhethang tsa piezoelectric, botsitso ba mocheso, le thepa ea optical, e leng se etsang hore li be tsa bohlokoa bakeng sa li-filters tsa maqhubu a holimo a acoustic (SAW), li-resonator tsa maqhubu a acoustic (BAW), li-modulator tsa optical, le li-detector tsa infrared. XKH e ikhethile ka ho etsa lipatlisiso le nts'etsopele ea li-wafer tsa LiTaO₃ tsa boleng bo holimo, e sebelisa lits'ebetso tse tsoetseng pele tsa kholo ea kristale ea Czochralski (CZ) le liquid phase epitaxy (LPE) ho netefatsa homogeneity e phahameng ea kristale ka bongata ba sekoli <100/cm².

XKH e fana ka di-wafer tsa LiTaO₃ tsa lisenthimithara tse 3, lisenthimithara tse 4, le lisenthimithara tse 6 tse nang le mahlakore a mangata a kristale (X-cut, Y-cut, Z-cut), tse tšehetsang mekhoa ea ho sebelisa doping (Mg, Zn) le ho pola ho fihlela litlhoko tse itseng tsa ts'ebeliso. Phetoho ea dielectric ea thepa (ε~40-50), coefficient ea piezoelectric (d₃₃~8-10 pC/N), le mocheso oa Curie (~600°C) li theha LiTaO₃ e le substrate e khethiloeng bakeng sa li-filter tse nang le maqhubu a phahameng le li-sensor tse nepahetseng.

Tlhahiso ea rona e kopantsoeng ka ho otloloha e akaretsa kholo ea kristale, ho betla, ho polisha le ho beoa ha filimi e tšesaane, ka bokhoni ba tlhahiso ea khoeli le khoeli bo fetang li-wafer tse 3,000 ho sebeletsa liindasteri tsa puisano tsa 5G, lisebelisoa tsa elektroniki tsa bareki, photonics le tšireletso. Re fana ka boeletsi bo felletseng ba tekheniki, tlhahlobo ea mehlala, le lits'ebeletso tsa prototyping tsa molumo o tlase ho fana ka litharollo tse ntlafalitsoeng tsa LiTaO₃.

Romella imeile ho rona

Likaroloana

Litekanyetso tsa tekheniki

Lebitso	LiTaO3 ea boemo ba mahlo	Boemo ba tafole ea molumo LiTaO3
Axial	Z sehiloeng + / - 0.2 °	Sehiloeng sa 36 ° Y / Sehiloeng sa 42 ° Y / Sehiloeng sa X(+ / - 0.2 °)
Bophara	76.2mm + / - 0.3mm/100±0.2mm	76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm
Sefofane sa Datum	22mm + / - 2mm	22mm + /-2mm32mm + /-2mm
Botenya	500um + /-5mm1000um + /-5mm	500um + /-20mm350um + /-20mm
TTV	≤ 10um	≤ 10um
Mocheso oa Curie	605 °C + / - 0.7 °C (mokhoa oa DTA)	605 °C + / -3 °C (mokhoa oa DTA
Boleng ba bokaholimo	Ho bentša mahlakore a mabeli	Ho bentša mahlakore a mabeli
Meeli e nang le chamfered	ho potoloha ha moedi	ho potoloha ha moedi

Litšobotsi tsa Bohlokoa

1. Sebopeho sa Crystal le Tshebetso ya Motlakase

· Ho Tsitsisa ha Crystallographic: 100% 4H-SiC polytype dominance, ha ho na li-inclusions tse ngata tse kentsoeng (mohlala, 6H/15R), ka XRD rocking curve full-width at half-maximum (FWHM) ≤32.7 arcsec.
· Ho Tsamaya ha Mokero o Phahameng: Ho Tsamaya ha dielektrone tsa 5,400 cm²/V·s (4H-SiC) le ho Tsamaya ha masoba a 380 cm²/V·s, ho nolofalletsa meralo ya disebediswa tse nang le maqhubu a phahameng.
·Bothata ba Mahlasedi: E mamella mahlaseli a 1 MeV a neutron ka tekanyo ea tšenyo ea ho falla ea 1×10¹⁵ n/cm², e loketse bakeng sa lits'ebetso tsa lifofane le tsa nyutlelie.

2. Thepa ea Thermal le Mechanical

· Ho Tsamaisa Mocheso ka Mofuthu o Ikhethang: 4.9 W/cm·K (4H-SiC), e fetang habeli ea silicon, e tšehetsang ts'ebetso kaholimo ho 200°C.
· Koefficient e Tlase ea Katoloso ea Thermal: CTE ea 4.0×10⁻⁶/K (25–1000°C), e netefatsang ho lumellana le sephutheloana se thehiloeng ho silicon le ho fokotsa khatello ea mocheso.

3. Taolo e Phethahetseng le ho Sebetsa ka nepo
.
· Botenya ba Micropipe: <0.3 cm⁻² (li-wafer tsa lisenthimithara tse 8), botenya ba ho falla <1,000 cm⁻² (e netefalitsoe ka ho etching ha KOH).
· Boleng ba Bokaholimo: CMP e bentšitsoeng ho Ra <0.2 nm, e fihlela litlhoko tsa ho ba bataletse ha lithography tsa sehlopha sa EUV.

Litšebeliso tsa Bohlokoa

Sebaka	Maemo a Kopo	Melemo ea Tekheniki
Puisano ea Optical	Li-laser tsa 100G/400G, li-module tsa silicon photonics tse kopantsoeng	Li-substrate tsa peo ea InP li nolofalletsa ho ba le lekhalo le tobileng (1.34 eV) le heteroepitaxy e thehiloeng ho Si, e fokotsang tahlehelo ea ho kopanya ha optical.
Likoloi tse Ncha tsa Matla	Li-inverter tse nang le motlakase o phahameng oa 800V, li-charger tse ka hare ho sekepe (OBC)	Li-substrate tsa 4H-SiC li mamella >1,200 V, li fokotsa tahlehelo ea conduction ka 50% le bophahamo ba sistimi ka 40%.
5G Communications	Lisebelisoa tsa RF tsa maqhubu a millimeter (PA/LNA), li-amplifier tsa matla a seteishene sa motheo	Li-substrate tsa SiC tse thibelang mocheso ka semi-insulation (resistivity >10⁵ Ω·cm) li nolofalletsa kopanyo e sa sebetseng ea maqhubu a phahameng (60 GHz+).
Lisebelisoa tsa indasteri	Li-sensor tsa mocheso o phahameng, li-transformer tsa hona joale, li-monitor tsa li-reactor tsa nyutlelie	Li-substrate tsa peo ea InSb (0.17 eV bandgap) li fana ka kutlo ea makenete ho fihlela ho 300%@10 T.

LiTaO₃ Li-wafer - Litšobotsi tsa Bohlokoa

1. Tshebetso e Phahameng ea Piezoelectric

· Li-coefficient tse phahameng tsa piezoelectric (d₃₃~8-10 pC/N, K²~0.5%) li nolofalletsa lisebelisoa tsa SAW/BAW tse nang le maqhubu a phahameng ka tahlehelo ea ho kenya <1.5dB bakeng sa li-filter tsa RF tsa 5G

· Khokahano e ntle ea motlakase e tšehetsa meralo ea sefe ea bandwidth e pharaletseng (≥5%) bakeng sa lits'ebetso tsa sub-6GHz le mmWave

2. Matlotlo a Optical

· Ponaletso ea Broadband (phetiso ea >70% ho tloha ho 400-5000nm) bakeng sa li-modulator tsa electro-optic tse fihlelang bandwidth ea >40GHz

· Ho tsieleha ho matla ha optical ho seng mola (χ⁽²⁾~30pm/V) ho thusa tlhahiso e sebetsang hantle ya bobedi ya harmonic (SHG) ditsamaisong tsa laser

3. Ho Tsitsisa Tikoloho

· Mocheso o Phahameng oa Curie (600°C) o boloka karabelo ea piezoelectric maemong a likoloi (-40°C ho isa ho 150°C)

· Ho se sebetse hantle ha lik'hemik'hale khahlanong le li-acid/alkaline (pH1-13) ho netefatsa ts'epahalo lits'ebetsong tsa sensor tsa indasteri.

4. Bokgoni ba ho Itlhophisa

· Boenjiniere ba tataiso: X-cut (51°), Y-cut (0°), Z-cut (36°) bakeng sa likarabo tsa piezoelectric tse etselitsoeng motho ka mong.

· Dikgetho tsa ho sebelisa doping: Mg-doped (ho hanyetsa tshenyo ya mahlo), Zn-doped (d₃₃ e ntlafaditsweng)

· Liqeto tsa bokaholimo: Ho bentša ho loketse Epitaxial (Ra<0.5nm), ITO/Au metallization

LiTaO₃ Li-wafers - Litšebeliso tsa mantlha

1. Li-module tsa RF Front-End

· Li-filter tsa 5G NR SAW (Lebanta n77/n79) tse nang le coefficient ea mocheso oa maqhubu (TCF) <|-15ppm/°C|

· Li-resonator tsa BAW tse nang le leqhubu le leholo haholo bakeng sa WiFi 6E/7 (5.925-7.125GHz)

2. Lifotoniki tse Kopantsoeng

· Li-modulator tsa Mach-Zehnder tse lebelo le phahameng (>100Gbps) bakeng sa puisano e kopaneng ea optical

· Li-detector tsa infrared tsa QWIP tse nang le maqhubu a bolelele ba cutoff tse ka fetoloang ho tloha ho 3-14μm

3. Lisebelisoa tsa Elektroniki tsa Likoloi

· Li-sensor tsa ho paka tsa Ultrasonic tse nang le maqhubu a sebetsang a >200kHz

· Li-transducer tsa piezoelectric tsa TPMS tse phelang mochesong oa -40°C ho isa ho 125°C

4. Mekhoa ea Tšireletso

· Li-filter tsa moamoheli oa EW tse nang le ho haneloa ha >60dB ka ntle ho sehlopha

· Lifensetere tsa IR tse batlang dimisaele tse fetisang mahlaseli a MWIR a 3-5μm

5. Mahlale a Hlahang

· Li-transducer tsa quantum tsa mahlo bakeng sa phetoho ea microwave ho ea ho optical

· Lihlopha tsa PMUT bakeng sa litšoantšo tsa ultrasound tsa bongaka (resolution ea >20MHz)

LiTaO₃ Li-wafers - Litšebeletso tsa XKH

1. Tsamaiso ea Ketane ea Phepelo

· Ho sebetsana le boule ho tloha ho wafer ka nako ea libeke tse 4 bakeng sa litlhaloso tse tloaelehileng

· Tlhahiso e ntlafalitsoeng ka theko e fanang ka monyetla oa theko oa 10-15% khahlanong le bahlolisani

2. Litharollo tse Ikhethileng

· Ho betla ka mokhoa o ikhethileng oa ho shebana le tataiso: 36°±0.5° Y-cut bakeng sa ts'ebetso e ntle ea SAW

· Metswako e nang le doped: MgO (5mol%) doping bakeng sa lits'ebetso tsa mahlo

Litšebeletso tsa ho etsa tšepe: Cr/Au (100/1000Å) ho etsa dipaterone tsa elektrode

3. Tšehetso ea Tekheniki

· Tlhaloso ea thepa: Li-curve tsa ho sisinyeha tsa XRD (FWHM<0.01°), tlhahlobo ea bokaholimo ba AFM

· Ketsiso ea sesebelisoa: ho etsa mohlala oa FEM bakeng sa ntlafatso ea moralo oa sefe ea SAW

Qetello

Li-wafer tsa LiTaO₃ li ntse li tsoela pele ho nolofalletsa tsoelo-pele ea theknoloji ho pholletsa le puisano ea RF, li-photonics tse kopantsoeng, le li-sensor tsa tikoloho e thata. Botsebi ba thepa ba XKH, ho nepahala ha tlhahiso, le tšehetso ea boenjiniere ba lits'ebetso li thusa bareki ho hlola liphephetso tsa moralo litsamaisong tsa elektroniki tsa moloko o latelang.